Publications

4 results for M. Poppeller

Robustness of ultrathin aluminum oxide dielectrics on Si(001)
- - M. Copel
  - E. Cartier
  - et al.
- 2001
- Applied Physics Letters
Hot electron emission lithography
- - M. Poppeller
  - E. Cartier
  - et al.
- 1999
- Microlithography 1999
Hot Electron Emission Lithography: A method for efficient large area e-beam projection
- - M. Poppeller
  - E. Cartier
  - et al.
- 1999
- Microelectronic Engineering
Hot electron emission lithography
- - M. Poppeller
  - E. Cartier
  - et al.
- 1998
- Applied Physics Letters