Publications

10 results for U. Staufer

Micromachined photoplastic probe for scanning near-field optical microscopy
- - G. Genolet
  - M. Despont
  - et al.
- 2001
- Review of Scientific Instruments
Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
- - Terunobu Akiyama
  - Andreas Tonin
  - et al.
- 1998
- Sensors and Actuators, A: Physical
Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding
- - M. Despont
  - H. Gross
  - et al.
- 1996
- Sensors and Actuators, A: Physical
Secondary electron imaging by means of a microfabricated electron column
- - C. Stebler
  - M. Despont
  - et al.
- 1996
- Journal de Physique III
Electron-beam microcolumn fabrication and testing
- - M. Despont
  - U. Staufer
  - et al.
- 1996
- Microelectronic Engineering
Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- - Michel Despont
  - Gilles Beljakovic
  - et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Microcolumn based low energy e-beam writing
- - C. Stebler
  - M. Despont
  - et al.
- 1996
- Microelectronic Engineering
Microfabrication of lenses of a miniaturized electron column
- - M. Despont
  - U. Staufer
  - et al.
- 1995
- Microelectronic Engineering
Arrayed lithography using STM-based microcolumns
- - T. H. Philip Chang
  - Lawrence P. Muray
  - et al.
- 1993
- SPIE Advanced Optical Technologies 1993
Arrayed miniature electron beam columns
- - T.H.P. Chang
  - L.P. Muray
  - et al.
- 1993
- Microelectronic Engineering