Publications

31 results for Siddarth A. Krishnan

Novel Materials and Processes in Replacement Metal Gate for Advanced CMOS Technology
- - Ruqiang Bao
  - Steven Hung
  - et al.
- 2018
- IEDM 2018
Process optimizations for NBTI/PBTI for future replacement metal gate technologies
- - Barry P. Linder
  - A. Dasgupta
  - et al.
- 2016
- IRPS 2016
Non-Contact, Sub-Surface Detection of Alloy Segregation in Back-End of Line Copper Dual-Damascene Structures
- - Joyeeta Nag
  - S. Ray
  - et al.
- 2015
- IEEE Trans Semicond Manuf
ALD TaN barrier for enhanced performance with low contact resistance for 14 nm Technology Node Cu Interconnects
- - Joyeeta Nag
  - Brian A. Cohen
  - et al.
- 2015
- ECS Meeting 2015 Phoenix
An Analytical Metal Resistance Model and Its Application for Sub-22-nm Metal-Gate CMOS
- - X. Miao
  - Ruqiang Bao
  - et al.
- 2015
- IEEE Electron Device Letters
High performance 14nm SOI FinFET CMOS technology with 0.0174μm² embedded DRAM and 15 levels of Cu metallization
- - C.-H.C-H. Lin
  - Brian Greene
  - et al.
- 2014
- IEDM 2014
Replacement metal gate resistance in FinFET architecture modelling, validation and extendibility
- - Ruqiang Bao
  - Brian Greene
  - et al.
- 2015
- IEDM 2015
Simple Gate Metal Anneal (SIGMA) stack for FinFET Replacement Metal Gate toward 14nm and beyond
- - Takashi Ando
  - B. Kannan
  - et al.
- 2014
- VLSI Technology 2014
Metal Gate/High-κ dielectric gate stack reliability; or how i learned to live with trappy oxides
- - Barry P. Linder
  - Eduard Cartier
  - et al.
- 2013
- ECS Meeting 2013
Deposited ALD SiO₂ high-k/metal gate interface for high voltage analog and I/O devices on next generation alternative channels and FINFET device structures
- - S. Siddiqui
  - M.M. Chowdhury
  - et al.
- 2013
- ECS Meeting 2013