Publications

76 results for E. Gusev

Interfacial microstructure of NiSi_x/HfO₂/SiO_x/Si gate stacks
- - M. Gribelyuk
  - C. Cabral Jr.
  - et al.
- 2007
- Thin Solid Films
Measurements of metal gate effective work function by x-ray photoelectron spectroscopy
- - Yuri Lebedinskii
  - Andrei Zenkevich
  - et al.
- 2007
- Journal of Applied Physics
Tunable Workfunction for Fully Silicied Gates (FUSI) and Proposed Mechanisms
- - Y.-H. Kim
  - C. Cabral Jr.
  - et al.
- 2006
- VLSI-TSA 2006
Advanced high-κ dielectric stacks with polySi and metal gates: Recent progress and current challenges
- - Evgeni P. Gusev
  - Vijay Narayanan
  - et al.
- 2006
- IBM J. Res. Dev
Thermal ammonia nitridation on HfO₂ and hafnium silicates thin films
- - J.-J. Ganem
  - I. Trimaille
  - et al.
- 2006
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
The role of Si orientation and temperature on the carrier mobility in metal oxide semiconductor field-effect transistors with ultrathin HfO ₂ gate dielectrics
- - B. Mereu
  - C. Rossel
  - et al.
- 2006
- Journal of Applied Physics
Process optimization for high electron mobility in nMOSFETs with aggressively scaled HfO₂/metal stacks
- - V. Narayanan
  - K. Maitra
  - et al.
- 2006
- IEEE Electron Device Letters
Room temperature interactions of water vapor with HfO ₂ films on Si
- - C. Driemeier
  - E. Gusev
  - et al.
- 2006
- Applied Physics Letters
Hybrid-orientation technology (HOT): Opportunities and challenges
- - Min Yang
  - Victor W.C. Chan
  - et al.
- 2006
- IEEE Transactions on Electron Devices
Characterization of HfO₂/Si exposed to water vapor at room temperature
- - Carlos Driemeier
  - Elizandra Martinazzi
  - et al.
- 2006
- MRS Spring Meeting 2006