Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography
- M. Schvartzman
- A. Mathur
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
61 results for S.J. Wind
Plasma fluorination of carbon-based materials for imprint and molding lithographic applications
- M. Schvartzman
- A. Mathur
- et al.
- 2008
- Applied Physics Letters
PaperAn integrated logic circuit assembled on a single carbon nanotube
- Zhihong Chen
- Joerg Appenzeller
- et al.
- 2006
- Science
PaperSub-50 nm half-pitch imaging with a low activation energy chemically amplified photoresist
- G.M. Wallraff
- D. Medeiros
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperTransistor structures for the study of scaling in carbon nanotubes
- S.J. Wind
- M. Radosavljević
- et al.
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperCarbon nanotube devices for future nanoelectronics
- S.J. Wind
- J. Appenzeller
- et al.
- 2003
- NANO 2003
Conference paperLateral scaling in carbon-nanotube field-effect transistors
- S.J. Wind
- J. Appenzeller
- et al.
- 2003
- Physical Review Letters
PaperLateral Scaling in Carbon-Nanotube Field-Effect Transistors
- S.J. Wind
- J. Appenzeller
- et al.
- 2003
- Physical Review Letters
PaperCarbon nanotube field effect transistors - Fabrication, device physics, and circuit implications
- H.-S. Wong
- J. Appenzeller
- et al.
- 2003
- ISSCC 2003
Conference paperControlled Growth of Single-Walled Carbon Nanotubes from a Line Patterned Mesoporous Silica Template
- Limin Huang
- Shalom J. Wind
- et al.
- 2003
- MRS Proceedings 2003
Conference paper