Wittmer et al. reply
- M. Wittmer
- P. Fahey
- et al.
- 1993
- Physical Review Letters
Paper
Publications
6 results for P. Fahey
Silicide formation and dopant diffusion in silicon
- M. Wittmer
- P. Fahey
- et al.
- 1992
- Physical Review B
PaperNovel diffusion phenomenon of dopants in silicon at low temperatures
- M. Wittmer
- P. Fahey
- et al.
- 1991
- Physical Review Letters
PaperInvestigation of the mechanism of Si self-interstitial injection from nitridation of SiO2 films
- P. Fahey
- P.B. Griffin
- 1990
- Silicon Materials Science and Technology 1990
Conference paperExperimental evidence of both interstitial- and vacancy-assisted diffusion of Ge in Si
- P. Fahey
- Subramanian S. Iyer
- et al.
- 1989
- Applied Physics Letters
PaperPoint defects and dopant diffusion in silicon
- P. Fahey
- P.B. Griffin
- et al.
- 1989
- Reviews of Modern Physics
Paper