Temperature and Bias Effects on the Physical and Tribological Properties of Diamond-Like Carbon
- A. Grill
- V.V. Patel
- et al.
- 2019
- JES
Paper
Publications
50 results for V.V. Patel
Interface modifications for improving the adhesion of a-c:H films to metals
- A. Grill
- B.S. Meyerson
- et al.
- 2011
- Journal of Materials Research
PaperOptical and tribological properties of heat-treated diamond-like carbon
- A. Grill
- V.V. Patel
- et al.
- 2011
- Journal of Materials Research
PaperIntegration compatible porous SiCOH dielectrics from 45 to 22 nm
- S. Gates
- A. Grill
- et al.
- 2008
- ADMETA 2008
Conference paperOptimized interfacial strength for dense and porous SiCOH
- D.D. Restaino
- Steve Molis
- et al.
- 2007
- ADMETA 2007
Conference paperDevelopment and optimization of porous pSiCOH interconnect dielectrics for 45 nm and beyond
- A. Grill
- S. Gates
- et al.
- 2008
- IITC 2008
Conference paperUltralow dielectric constant pSiCOH films prepared with tetramethylcyclotetrasiloxane as skeleton precursor
- A. Grill
- V.V. Patel
- 2008
- Journal of Applied Physics
PaperInterface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
- A. Grill
- D. Edelstein
- et al.
- 2008
- Journal of Applied Physics
PaperA porous SiCOH dielectric with k=2.4 for high performance BEOL interconnects
- S. Gates
- A. Grill
- et al.
- 2006
- ADMETA 2006
Conference paperA 45 nm CMOS node Cu/low-k/ ULtra low-k PECVD SiCOH (k=2.4) BEOL technology
- S. Sankaran
- S. Arai
- et al.
- 2006
- IEDM 2006
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