Interhalogen plasma chemistries for dry etch patterning of Ni, Fe, NiFe and NiFeCo thin films
- H. Cho
- K.B. Jung
- et al.
- 1999
- Applied Surface Science
Paper
Publications
16 results for S.J. Pearton
Interhalogen Plasma Chemistries for the Etching of NiMnSb
- H. Cho
- K.B. Jung
- et al.
- 1999
- Electrochemical and Solid-State Letters
PaperComparison of Cl2 and F2 based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- J. Hong
- J.A. Caballero
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHigh density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements
- K.B. Jung
- J. Hong
- et al.
- 1999
- Applied Surface Science
PaperSette et al. respond
- F. Sette
- S.J. Pearton
- et al.
- 1987
- Physical Review Letters
PaperLocal structure of S impurities in gaAs
- F. Sette
- S.J. Pearton
- et al.
- 1986
- Physical Review Letters
Paper