Extended x-ray absorption fine structure studies by soft x-ray fluorescence detection
- F. Sette
- S.J. Pearton
- et al.
- 2007
- Physica Scripta
Paper
Publications
16 results for S.J. Pearton
Corrosion-free dry etch patterning of magnetic random access memory stacks: Effects of ultraviolet illumination
- H. Cho
- K.-P. Lee
- et al.
- 2000
- Journal of Applied Physics
PaperEffect of inert gas additive on Cl2-based inductively coupled plasma etching of NiFe and NiFeCo
- K.B. Jung
- H. Cho
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperInductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixtures
- H. Cho
- K.B. Jung
- et al.
- 1999
- Materials Science and Engineering B: Solid-State Materials for Advanced Technology
PaperCl2-based inductively coupled plasma etching of CoFeB, CoSm, CoZr and FeMn
- K.B. Jung
- H. Cho
- et al.
- 1999
- Materials Science and Engineering B: Solid-State Materials for Advanced Technology
PaperParametric study of NiFe and NiFeCo high density plasma etching using CO/NH3
- K.B. Jung
- J. Hong
- et al.
- 1999
- JES
PaperPlasma etching of NiFe/Cu and NiMnSb/Al2O3 multilayers for sub-micron pattern definition
- K.B. Jung
- J. Hong
- et al.
- 1999
- Journal of Magnetism and Magnetic Materials
PaperRelative merits of [formula omitted] and [formula omitted] plasma chemistries for dry etching of magnetic random access memory device elements
- K.B. Jung
- H. Cho
- et al.
- 1999
- Journal of Applied Physics
Conference paperComparison of Cl2/He, Cl2/Ar, and Cl2/Xe plasma chemistries for dry etching of NiFe and NiFeCo
- K.B. Jung
- H. Cho
- et al.
- 1999
- JES
PaperPatterning of NiFe and NiFeCo in CO/NH3 high density plasmas
- K.B. Jung
- J. Hong
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper