Publications

15 results for K.K. Shih

Fabrication of phase shifting masks employing multi-layer films
- - T.C. Chicu
  - K.K. Shih
  - et al.
- 1994
- Microlithography 1994
Deposition of aluminum oxide films with high refractive index
- - K.K. Shih
  - D.B. Dove
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Properties of Co-N, Co-Fe-N, and Co-Zr-N films prepared by rf sputtering in nitrogen-argon gas mixtures
- - K.K. Shih
  - J. Karasinski
- 1993
- Journal of Applied Physics
Properties of NiFe-N films prepared by rf sputtering in nitrogen-argon gas mixtures
- - K.K. Shih
  - M.E. Re
  - et al.
- 1992
- Journal of Applied Physics
Ti/Ti-N Hf/Hf-N and W/W-N multilayer films with high mechanical hardness
- - K.K. Shih
  - D.B. Dove
- 1992
- Applied Physics Letters
Thermal transfer printing with heat amplification
- - A. Aviram
  - K.K. Shih
  - et al.
- 1991
- Journal of imaging technology
Thermal transfer printing with heat amplification
- - Ari Aviram
  - Kwang K. Shih
  - et al.
- 1991
- IS&T/SPIE Electronic Imaging 1991
Fe/Fe-N multilayer films with low coercivity zero magnetostriction and high saturation magnetization
- - K.K. Shih
  - M.E. Re
  - et al.
- 1990
- Applied Physics Letters
Structure and orientation of films prepared by reactive sputtering of Ni, Fe, and NiFe in Ar/N₂ mixtures
- - T. Takamori
  - K.K. Shih
  - et al.
- 1990
- Journal of Applied Physics
Properties of W-N and Mo-N films prepared by reactive sputtering
- - K.K. Shih
  - D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films