K.K. Shih, D.B. Dove
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A method of fabricating of Fe/Fe-N multilayer films in the form of alternating thin films of Fe separated by very thin interlayers of Fe-N sputtered in the presence of nitrogen is described. It was found that the properties of these films depended on the thickness of Fe and Fe-N layers and the bias voltage. There is a region where the composite films have coercivity less than 1 Oe, with zero or near-zero magnetostriction. The normally high saturation magnetization of Fe with value of 20 kG was preserved.
K.K. Shih, D.B. Dove
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
D.B. Dove, S. Schwarzl
Journal of Applied Physics
A.P. Ghosh, D.B. Dove
Microlithography 1992
Ph. Avouris, I.F. Chang, et al.
Journal of Electronic Materials