Ultrafast deep UV lithography using excimer lasers
- K. Jain
- S. Rice
- et al.
- 2004
- Polymer Engineering & Science
Paper
Publications
4 results for S. Rice
Direct high-resolution excimer laser photoetching
- S. Rice
- K. Jain
- 1984
- Applied Physics A Solids and Surfaces
PaperExcimer laser projection photoetching
- M.R. Latta
- R. Moore
- et al.
- 1984
- Journal of Applied Physics
PaperReciprocity Behavior of Photoresists in Excimer Laser Lithography
- Sondra Rice
- Kanti Jain
- 1984
- IEEE T-ED
Paper