Publications

14 results for M. Chen

Etching Silicon with Fluorine Gas
- - M. Chen
  - V.J. Minkiewicz
  - et al.
- 2019
- JES
Heating Effects In Reactive Etching Of Nb And Nb₂0₅
- - Young H. Lee
- 2019
- JES
Magnetic field control of reactive plasma etching
- - V.J. Minkiewicz
  - M. Chen
  - et al.
- 2008
- Applied Physics Letters
Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
- - J.W. Coburn
  - M. Chen
- 2008
- Journal of Applied Physics
I-V characteristics of microwave-driven Josephson junctions in the low-frequency and high-damping regime
- - C. Vanneste
  - C.C. Chi
  - et al.
- 1985
- Physical Review B
Doping effects in reactive plasma etching of heavily doped silicon
- - Young H. Lee
  - Mao-Min Chen
  - et al.
- 1985
- Applied Physics Letters
Practical dc squids with extremely low 1/f noise
- - C.D. Tesche
  - K.H. Brown
  - et al.
- 1985
- IEEE Transactions on Magnetics
HEATING EFFECT IN HIGHLY CONDUCTING MATERIALS DURING PLASMA ETCHING.
- - Y.H. Lee
  - M. Chen
- 1983
- ECS Meeting 1983
THRESHOLD CHARACTERISTICS OF MUTUALLY COUPLED SQUIDS.
- - C.C. Chi
  - L. Krusin-Elbaum
  - et al.
- 1983
- International Conference on Low Temperature Physics (LT) 1983
ETCH ANISOTROPY OF UNDOPED POLYSILICON FILMS.
- - D. Favreau
  - M. Chen
  - et al.
- 1983
- ECS Meeting 1983