Publications

32 results for Hiroyuki Hiraoka

Contrast Enhancement and Resist Wall Profile Control by Surface Crosslinkage
- - H. Hiraoka
- 1988
- J. Photopolym. Sci. Tech.
Paper
Enhancement of RIE resistance of conventional resist materials
- - H. Hiraoka
- 1989
- Proceedings of SPIE 1989
Conference paper
Sub-halfmicron negative resist systems by image reversal
- - K. Chiong
  - H. Hiraoka
- 1989
- Proceedings of SPIE 1989
Conference paper
Direct patterning of polyimide by pulsed electron beams in soft vacuum
- - Jayaram Krisinaswamy
  - Lumin Li
  - et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Non-linear photochemistry of polymer films: laser ablation of poly (n-vinylcarbazole)
- - Hiroshi Masuhara
  - Hiroyuki Hiraoka
  - et al.
- 1987
- Chemical Physics Letters
Paper
Resist image enhancement by UV-, soft vacuum pulsed electron beams and organometallic compounds
- - Hiroyuki Hiraoka
- 1987
- Microelectronic Engineering
Paper
SIMULTANEOUS VAPOR DEPOSITION OF METAL AND MONOMERIC COMPOUNDS: LITHOGRAPHIC APPLICATIONS.
- - H. Hiraoka
  - J. Duran
- 1986
- Microlithography 1986
Conference paper
DEEP UV PHOTOLITHOGRAPHY WITH COMPOSITE PHOTORESISTS MADE OF POLY(OLEFIN SULFONES).
- - H. Hiraoka
  - L.W. Welsh Jr.
- 1983
- ACS National Meeting 1983
Conference paper
High resolution polymer pattern fabrications with Low energy proton beams
- - H. Hiraoka
- 1984
- Microlithography 1984
Conference paper
Polymer degradation in reactive ion etching and its possible application to all dry processes
- - H. Hiraoka
  - L.W. Welsh Jr.
- 1981
- Radiation Physics and Chemistry
Paper