Hiroyuki Hiraoka, Tsuguo Yamaoka
Microelectronic Engineering
Irradiation of some poly(N-vinylcarbazole) films with a 248 nm excimer laser resulted in their ablation, giving an etched hole with a submicrometer depth. A characteristic periodic pattern and small particles with diameter of the order of submicrometers were formed in the etched area. This ablation behavior was affected by doping excitation energy and electron acceptors, discussed from a photophysical viewpoint. © 1987.
Hiroyuki Hiraoka, Tsuguo Yamaoka
Microelectronic Engineering
Hiroyuki Hiraoka
Applied Physics Letters
Hiroyuki Hiraoka
Macromolecules
Hiroyuki Hiraoka, Uri Ladabaum
Japanese Journal of Applied Physics