Hiroshi Ito, H.D. Truong, et al.
J. Photopolym. Sci. Tech.
A report is presented on the thermal decomposition behavior of several polymethacrylates and the effect of the ester structure on the thermolysis in correlation with the photosensitivity in acid-catalyzed thermolysis. Differential scanning calorimetry (DSC) curves of the polymethacrylates and presented together with that of PMAA Polymethacrylic Acid PMAA loses absorbed water below 140°C (1st heating), and then dehydrates to form PMAN, at the temperature ranging from 180 to 260°C.
Hiroshi Ito, H.D. Truong, et al.
J. Photopolym. Sci. Tech.
Hiroshi Ito, G.M. Wallraff, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
P. Rao Varanasi, R.D. Allen, et al.
J. Photopolym. Sci. Tech.
Hiroshi Ito, William P. England, et al.
Microlithography 1993