Thermally Developable, Positive Tone, Oxygen RIE Barrier Resist for Bilayer Lithography
- Hiroshi Ito
- Mitsuru Ueda
- et al.
- 2019
- JES
Publications
22 results for Mitsuru Ueda
Sensitive resist systems based on acid‐catalyzed polymer reactions
- Hiroshi Ito
- William P. England
- et al.
- 2011
- Makromolekulare Chemie. Macromolecular Symposia
Characterization and lithographic application of calix[4]resorcinarene derivatives
- Hiroshi Ito
- Tomonari Nakayama
- et al.
- 2007
- Chemistry of Materials
Polymerization of α‐methyleneindane: A cyclic analog of α‐methylstyrene
- Mitsuru Ueda
- Motokazu Mano
- et al.
- 2003
- Journal of Polymer Science Part A: Polymer Chemistry
Thermolysis and Photochemical Acidolysis of Selected Polymethacrylates
- Hiroshi Ito
- Mitsuru Ueda
- 2002
- Macromolecules
Reaction of α- (trifluoromethyl) Styrene With Anionic Initiators
- Hiroshi Ito
- Alfred F. Renaldo
- et al.
- 2002
- Macromolecules
Syntheses of Acetophenone Eno1 Ester Polymers and Their Conversion to Poly(phenylacetylenes)
- Hiroshi Ito
- Mitsuru Ueda
- 2002
- Macromolecules
Kinetics, Thermodynamics, and Monomer Reactivities in Radical Polymerization of α-Acetoxystyrene
- Mitsuru Ueda
- Takashi Ito
- et al.
- 2002
- Macromolecules
Thermal and Acid-Catalyzed Deesterification and Rearrangement of Poly(2-cyclopropyl-2-propyl 4-vinylbenzoate) and Their Application to Lithographic Imaging
- Hiroshi Ito
- William P. England
- et al.
- 2002
- Macromolecules
Radical polymerization of methyl trans‐β‐vinylacrylate
- Mitsuru Ueda
- Shinichi Shimada
- et al.
- 1995
- Journal of Polymer Science Part A: Polymer Chemistry