Publications

2 results for G.J. Coyle

Study of near‐surface disorder and surface residues after reactive Ion etching of Silicon
- - G.S. Oehrlein
  - G.J. Coyle
  - et al.
- 2004
- Surface and Interface Analysis
Summary Abstract: Reactive ion-etching-related Si surface residues and subsurface disorder
- - G.S. Oehrlein
  - J.G. Clabes
  - et al.
- 1986
- JVSTA