Plasma characterization for a divergent field electron cyclotron resonance source

A set of experiments has been carried out in order to characterize the plasma extracted from a divergent magnetic field electron cyclotron resonance plasma source. Langmuir probe and Faraday cup measurements have been used to measure the electron temperature, plasma density, and plasma uniformity in the extracted plasma. Plasma production efficiencies of better than 1 A of extracted plasma per 300 W of microwave power have been observed. Electron densities greater than 3 X 1011 cm-3 have been measured over a range of pressures. A strong correlation is found between the radial dependence of the ion saturation current and the resultant rates and uniformity of photoresist etched with O2 gas. © 1989, American Vacuum Society. All rights reserved.