GaAs-oxide removal using an electron cyclotron resonance hydrogen plasma
- Z. Lu
- M.T. Schmidt
- et al.
- 1991
- Applied Physics Letters
Publications
4 results for John Forster
Doppler profile measurement of Ar and Ar+ translational energies in a divergent magnetic field electron cyclotron resonance source
- John S. McKillop
- John C. Forster
- et al.
- 1989
- Applied Physics Letters
Optical emission characterization of a divergent magnetic field electron cyclotron resonance source
- John S. McKillop
- John C. Forster
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma characterization for a divergent field electron cyclotron resonance source
- John Forster
- William Holber
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films