Paper
Resist materials
Scott A. MacDonald, Jean M.J. Frechet, et al.
Microelectronic Engineering
The problem of synthesizing photosensitive urethanes of the highly sterically hindered 2,2,6,6-tetramethylpiperidine is solved by first preparing the 1-chlorocarbonyl derivative which was shown to react with a series of o-nitrobenzylic alcohols, including 2,6-dinitrobenzyl alcohol. These products are potential photogenerators of this amine. Full characterization is reported, along with a crystal structure. © 1994, American Chemical Society. All rights reserved.
Scott A. MacDonald, Jean M.J. Frechet, et al.
Microelectronic Engineering
William W. Fleming, Scott A. MacDonald
Analytical Chemistry
Anders Hult, Scott A. MacDonald, et al.
Macromolecules
Scott A. MacDonald, William D. Hinsberg, et al.
Chemistry of Materials