PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related PolymersH. HiraokaJES
Conference paperSIMULTANEOUS VAPOR DEPOSITION OF METAL AND MONOMERIC COMPOUNDS: LITHOGRAPHIC APPLICATIONS.H. Hiraoka, J. DuranMicrolithography 1986
PaperLaser-photoetching characteristics of polymers with dopantsT.J. Chuang, H. Hiraoka, et al.Applied Physics A Solids and Surfaces
PaperPolymer degradation in reactive ion etching and its possible application to all dry processesH. Hiraoka, L.W. Welsh Jr.Radiation Physics and Chemistry