Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Shu Tezuka
WSC 1991
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007