Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
No abstract available.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990