Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
No abstract available.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
A. Skumanich
SPIE OE/LASE 1992
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WSC 2003
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IEEE Transactions on Pattern Analysis and Machine Intelligence