Microlithographic applications of silicon-containing polymers and individual organosilicon compounds

J. Paraszczak, E. Babich, et al.

Microelectronic Engineering

E. Babich, J. Paraszczak, et al.

ACS National Meeting 1989

J.M. Shaw, M. Hatzakis, et al.

Polymer Engineering & Science

N.J. Chou, J. Paraszczak, et al.

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films