Cross-linking of poly{1,1-diaryl(alkyl,aryl) 1-silacyclobutanes} under electron beam and deep UV irradiation

S.J. Wind, Y. Taur, et al.

MRS Spring Meeting 1995

J. Paraszczak, J.M. Shaw, et al.

Microlithography 1983

George A. Sai-Halasz, Matthew R. Wordeman, et al.

IEEE Electron Device Letters

D.D. Tang, P.-K. Wang, et al.

IEDM 1995