Conference paper
Chemistry of hexamethylcyclotrisilazane (HMCTS) silylation
K.J. Stewart, J.M. Shaw, et al.
Symposium on Patterning Science and Technology 1989
K.J. Stewart, J.M. Shaw, et al.
Symposium on Patterning Science and Technology 1989
N. LaBianca, J. Gelorme
Microlithography 1995
A. Afzali, Stephen L. Buchwalter, et al.
Polymer
G. Hougham, G. Tesoro, et al.
Macromolecules