J.E.E. Baglin, F.M. D'Heurle, et al.
Journal of Applied Physics
The theoretical description of transistors has been impeded by the lack of knowledge of the p-type impurity distributions. A method is described which accurately gives concentration profiles of the boron p-type regions in transistors. The technique has been used to establish that the base regions in the fastest bipolar transistors are markedly different than usually assumed. © 1972 The American Institute of Physics.
J.E.E. Baglin, F.M. D'Heurle, et al.
Journal of Applied Physics
W.K. Chu, B.L. Crowder, et al.
Applied Physics Letters
J.E.E. Baglin, M.H. Tabacniks, et al.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
J.F. Ziegler, W.A. Lanford
Journal of Applied Physics