J.E.E. Baglin, J.F. Ziegler
Journal of Applied Physics
The theoretical description of transistors has been impeded by the lack of knowledge of the p-type impurity distributions. A method is described which accurately gives concentration profiles of the boron p-type regions in transistors. The technique has been used to establish that the base regions in the fastest bipolar transistors are markedly different than usually assumed. © 1972 The American Institute of Physics.
J.E.E. Baglin, J.F. Ziegler
Journal of Applied Physics
S. García-Blanco, A.J. Kellock, et al.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
M.Y. Tsai, F.F. Morehead, et al.
Journal of Applied Physics
Olav Hellwig, Dieter Weller, et al.
Applied Physics Letters