E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Paper
Interactions Between Cr and Pt Films: New Cr-Pt Phases
Abstract
Thin film studies are frequently concerned with the characteristics of metastable alloy phases. However, the analysis of diffusion in thin film couples can lead to new contributions to the understanding of the equilibrium state. In Cr-Pt films new ordered phases Pt3Cr and PtCr have been found. PtCr is slightly tetragonal. © 1978, The Electrochemical Society, Inc. All rights reserved.
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