William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
No abstract available.
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008