A 70GHz manufacturable complementary LC-VCO with 6.14GHz tuning range in 65nm SOI CMOS

A complementary LC-VCO is integrated in a 65nm SOI process and is statistically characterized on a 300mm wafer. Average center frequency is 67.9GHz and frequency tuning range is 6.14GHz or 9.05%. It achieves a phase noise of -106dBc/Hz at 10MHz offset and consumes 5.37mW from a 1.2V supply. The VCO yield is 94.7% for 70GHz operation. ©2007 IEEE.