Publications

12 results at MRS Online Proceedings Library

Amorphization of crystalline phase change material by ion implantation
- - Simone Raoux
  - Guy M. Cohen
  - et al.
- 2010
- MRS Online Proceedings Library
Effect of TaN stoichiometry on barrier oxidation and defect density in 32nm Cu/ultra-low K interconnects
- - Andrew H. Simon
  - Frieder Baumann
  - et al.
- 2010
- MRS Online Proceedings Library
Fabrication of prototype magnetic coupled spin-torque devices for non-volatile logic applications
- - Larkhoon Leem
  - James S. Harris
  - et al.
- 2010
- MRS Online Proceedings Library
Reducing time dependent line to line leakage following post CMP clean
- - Donald F. Canaperi
  - Satyavolu S. Papa Rao
  - et al.
- 2010
- MRS Online Proceedings Library
Epitaxial Dy₂O₃ thin films grown on Ge(100) substrates by molecular beam epitaxy
- - Md. Nurul Kabir Bhuiyan
  - Mariela Menghini
  - et al.
- 2010
- MRS Online Proceedings Library
Influence of bottom contact material on the selective chemical vapor deposition of crystalline GeSbTe alloys
- - Alejandro G. Schrott
  - Chieh-Fang Chen
  - et al.
- 2010
- MRS Online Proceedings Library
Cu CMP edge uniformity improvement studies for 32 nm technology node and beyond
- - John H. Zhang
  - Laertis Economikos
  - et al.
- 2010
- MRS Online Proceedings Library
The effect of forming gas annealing on Pt/(Ba,Sr)TiO₃/Pt thin film capacitors for future dram applications: Electrical properties and degradation mechanisms
- - J.D. Baniecki
  - C. Parks
  - et al.
- 2001
- MRS Online Proceedings Library
Electrodes and barriers for dram and feram: Processing, integration, and fundamentals
- - K.L. Saenger
  - P.C. Andricacos
  - et al.
- 2001
- MRS Online Proceedings Library
Micro-wear scan test on the carbon overcoats as thin as 6 nm or less
- - T.W. Wu
  - Thomas W. Scharf
  - et al.
- 2000
- MRS Online Proceedings Library