Physical characterization of sub-32-nm semiconductor materials and processes using advanced ion beam-based analytical techniques
- M. Hopstaken
- D. Pfeiffer
- et al.
- 2012
- Surface and Interface Analysis
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19 results at Surface and Interface Analysis
SIMS quantification of SiGe composition with low-energy ion beams
- Zhengmao Zhu
- Paul Ronsheim
- et al.
- 2011
- Surface and Interface Analysis
The early history and future of the SEM
- Oliver C. Wells
- David C. Joy
- 2006
- Surface and Interface Analysis
A comparative study of SIMS depth profiling of boron in silicon
- J.B. Clegg
- A.E. Morgan
- et al.
- 2004
- Surface and Interface Analysis
Investigation of gallium arsenide multilayer structures using a tunnelling microscope combined with a UHV‐SEM
- O. Albrektsen
- H. Salemink
- 2004
- Surface and Interface Analysis
A possible solution to the problem of compositional change with ion‐bombarded oxides
- Imre Bertóti
- Roger Kelly
- et al.
- 2004
- Surface and Interface Analysis
Ultrafast electron dynamics at semiconductor surfaces and interfaces studied with subpicosecond laser photoemission
- R. Haight
- M. Baeumler
- et al.
- 2004
- Surface and Interface Analysis
Quantitative time‐of‐flight secondary ion mass spectrometry of a perfluorinated polyether
- David E. Fowler
- Roboert D. Johnson
- et al.
- 2004
- Surface and Interface Analysis
Adhesion of copper and chromium films to polyimide studied by static SIMS of the interface
- W.J. van Ooij
- R.H.G. Brinkhuis
- et al.
- 2004
- Surface and Interface Analysis
Mechanism of silicon surface roughening by reactive ion etching
- Gottlieb S. Oehrlein
- Robert G. Schad
- et al.
- 2004
- Surface and Interface Analysis