Publications

19 results at Surface and Interface Analysis

Physical characterization of sub-32-nm semiconductor materials and processes using advanced ion beam-based analytical techniques
- - M. Hopstaken
  - D. Pfeiffer
  - et al.
- 2012
- Surface and Interface Analysis
SIMS quantification of SiGe composition with low-energy ion beams
- - Zhengmao Zhu
  - Paul Ronsheim
  - et al.
- 2011
- Surface and Interface Analysis
The early history and future of the SEM
- - Oliver C. Wells
  - David C. Joy
- 2006
- Surface and Interface Analysis
Study of near‐surface disorder and surface residues after reactive Ion etching of Silicon
- - G.S. Oehrlein
  - G.J. Coyle
  - et al.
- 2004
- Surface and Interface Analysis
Chromium chromate as an inert marker in copper oxidation
- - Robert J. Day
  - Margaret A. Frisch
- 2004
- Surface and Interface Analysis
Ultrafast electron dynamics at semiconductor surfaces and interfaces studied with subpicosecond laser photoemission
- - R. Haight
  - M. Baeumler
  - et al.
- 2004
- Surface and Interface Analysis
Influence of the bombarding ion energy and surface composition on the ground‐state atom fraction in solids analysis using multiphoton resonance ionization
- - David L. Pappas
  - David M. Hrubowchak
  - et al.
- 2004
- Surface and Interface Analysis
Interfacial reactions between Al and RuO₂, MoO_x and WN_x diffusion barriers on Si
- - S.-E. Hörnström
  - A. Charai
  - et al.
- 2004
- Surface and Interface Analysis
Quantitative time‐of‐flight secondary ion mass spectrometry of a perfluorinated polyether
- - David E. Fowler
  - Roboert D. Johnson
  - et al.
- 2004
- Surface and Interface Analysis
A comparative study of SIMS depth profiling of boron in silicon
- - J.B. Clegg
  - A.E. Morgan
  - et al.
- 2004
- Surface and Interface Analysis