Publications

15 results at Electrochemical and Solid-State Letters

Epitaxy of ultrathin NiSi₂ films with predetermined thickness
- - Xindong Gao
  - Joakim Andersson
  - et al.
- 2011
- Electrochemical and Solid-State Letters
Millisecond flash annealing as a flatband voltage shift enabler for p-type metal-oxide-semiconductor devices with high-k/metal gate
- - Changhwan Choi
  - Vijay Narayanan
- 2011
- Electrochemical and Solid-State Letters
Thermal stability of copper contact metallization using Ru-containing liner
- - Soon-Cheon Seo
  - C.-C. Yang
  - et al.
- 2011
- Electrochemical and Solid-State Letters
Effects of contact area on mechanical strength, electrical resistance, and electromigration reliability of Cu/Low- k interconnects
- - C.-C. Yang
  - T.M. Shaw
  - et al.
- 2010
- Electrochemical and Solid-State Letters
Selective chemical vapor deposition-grown Ru for Cu interconnect capping applications
- - C.-C. Yang
  - Fenton R. McFeely
  - et al.
- 2010
- Electrochemical and Solid-State Letters
Activation of implanted n-type dopants in Ge over the active concentration of 1× 10²⁰ cm^-3 using coimplantation of Sb and P
- - Jeehwan Kim
  - Stephen W. Bedell
  - et al.
- 2009
- Electrochemical and Solid-State Letters
Suppressor effects during copper superfilling of sub-100 nm lines
- - Q. Huang
  - B.C. Baker-O'Neal
  - et al.
- 2009
- Electrochemical and Solid-State Letters
Epitaxial formation of a metastable hexagonal nickel-silicide
- - K. De Keyser
  - C. Van Bockstael
  - et al.
- 2008
- Electrochemical and Solid-State Letters
Anisotropic growth of nanostructures in germanium electroplating
- - Q. Huang
  - H. Deligianni
  - et al.
- 2007
- Electrochemical and Solid-State Letters
Single-crystalline Germanium thin films by electrodeposition and solid-phase epitaxy
- - Q. Huang
  - S.W. Bedell
  - et al.
- 2007
- Electrochemical and Solid-State Letters