Publications

28 results at J. Micro/Nanolithogr. MEMS MOEMS

Fundamental characterization of stochastic variation for improved single-expose extreme ultraviolet patterning at aggressive pitch
- - Jennifer Church
  - Luciana Meli
  - et al.
- 2020
- J. Micro/Nanolithogr. MEMS MOEMS
Deep learning-based detection, classification, and localization of defects in semiconductor processes
- - Dhruv V. Patel
  - Ravi Bonam
  - et al.
- 2020
- J. Micro/Nanolithogr. MEMS MOEMS
Overlay error statistics for multiple-exposure patterning
- - Allen Gabor
  - Nelson Felix
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Inorganic hardmask development for extreme ultraviolet patterning
- - Anuja De Silva
  - A. Dutta
  - et al.
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Self-aligned blocking integration demonstration for critical sub-30-nm pitch Mx level patterning with EUV self-aligned double patterning
- - Angelique Raley
  - Joe Lee
  - et al.
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Defect detection strategies and process partitioning for single-expose EUV patterning
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Modeling fluid transport in two-dimensional paper networks
- - Jaione Tirapu-Azpiroz
  - Ademir Ferreira Silva
  - et al.
- 2018
- J. Micro/Nanolithogr. MEMS MOEMS
Multiple stages of regression to improve accuracy in calibrated lithography process models
- - Pardeep Kumar
  - Alan E. Rosenbluth
  - et al.
- 2018
- J. Micro/Nanolithogr. MEMS MOEMS
Ultrathin extreme ultraviolet patterning stack using polymer brush as an adhesion promotion layer
- - Indira Seshadri
  - Anuja De Silva
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
Development of TiO₂ containing hardmasks through plasma-enhanced atomic layer deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS