Publications

17 results at SPIE Advanced Lithography 2014

Automated sample plan selection for OPC modeling
- - Nathalie Casati
  - Maria Gabrani
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Fast detection of novel problematic patterns based on dictionary learning and prediction of their lithographic difficulty
- - F. De Morsier
  - David Demaris
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Characterization and mitigation of overlay error on silicon wafers with nonuniform stress
- - T.A. Brunner
  - V. Menon
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Computational lithography platform for 193i-guided directed self-assembly
- - Kafai Lai
  - Melih Ozlem
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk
- - David Fryer
  - Michael Lam
  - et al.
- 2014
- SPIE Advanced Lithography 2014
ICE: Ionic contrast enhancement for organic solvent negative tone develop
- - Linda K. Sundberg
  - Gregory M. Wallraff
  - et al.
- 2014
- SPIE Advanced Lithography 2014
CDSEM AFM hybrid metrology for the characterization of gate-all-around silicon nano wires
- - Shimon Levi
  - Ishai Schwarzband
  - et al.
- 2014
- SPIE Advanced Lithography 2014
E-beam inspection of EUV mask defects: To etch or not to etch?
- - Ravi Bonam
  - Hung-Yu Tien
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Molecular glass resists for scanning probe lithography
- - Christian Neuber
  - Andreas Ringk
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Novel in-line metrology methods for Fin pitch walking monitoring in 14nm node and beyond
- - Robin Chao
  - Kriti Kohli
  - et al.
- 2014
- SPIE Advanced Lithography 2014