NITRIDED SiO//2 FILMS FOR VLSI APPLICATIONS.
- A. Ray
- C.J. Merz
- et al.
- 1984
- ECS Meeting 1984
Publications
10 results at ECS Meeting 1984
SOME BASIC PROBLEMS IN VLSI INTERCONNECT.
- P.S. Ho
- 1984
- ECS Meeting 1984
INCREASING THE CURRENT DRIVING CAPABILITY OF EPITAXIAL SCHOTTKY BARRIER DIODES USING HIGH-ENERGY IMPLANTATION.
- C.T. Chuang
- G.P. Li
- et al.
- 1984
- ECS Meeting 1984
EFFECTS OF MeV IMPLANTATION ON THE CHARACTERISTICS OF p-n JUNCTIONS.
- L.K. Wang
- G.P. Li
- et al.
- 1984
- ECS Meeting 1984
CONTACT PROPERTIES OF METAL/POLYACETYLENE INTERFACES.
- Jerzy Kanicki
- 1984
- ECS Meeting 1984
SOLID SOLUTIONS OF WSi//2 WITH TiSi//2 OR TaSi//2: STRUCTURE AND RESISTIVITY.
- P. Gas
- J. Tardy
- et al.
- 1984
- ECS Meeting 1984
HIGH TEMPERATURE PROCESS LIMITATIONS ON TiSi//2.
- C.-Y. Ting
- F.M. d'Heurle
- et al.
- 1984
- ECS Meeting 1984
ON THE DETERMINATION OF SHARP DOPING PROFILES.
- Subramanian S. Iyer
- Frederick G. Allen
- 1984
- ECS Meeting 1984
BASIC PROBLEMS IN VLSI INTERCONNECT.
- P.S. Ho
- 1984
- ECS Meeting 1984
NITRIDED SiO//2 FILMS FOR VLSI APPLICATIONS.
- A. Ray
- C.J. Merz
- et al.
- 1984
- ECS Meeting 1984