Publications

2 results at ADMETA 2006

Non-poisoning dual damascene patterning scheme for low-k and ultra low-k BEOL
- - W. Cote
  - D. Edelstein
  - et al.
- 2006
- ADMETA 2006
Conference paper
A porous SiCOH dielectric with k=2.4 for high performance BEOL interconnects
- - S. Gates
  - A. Grill
  - et al.
- 2006
- ADMETA 2006
Conference paper