Breakdown measurements of ultra-thin SiO2 at low voltage
- J.H. Stathis
- A. Vayshenker
- et al.
- 2000
- VLSI Technology 2000
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4 results at VLSI Technology 2000
Modular 0.13 μm bulk CMOS technology for high performance and low power applications
- L.K. Han
- S. Biesemans
- et al.
- 2000
- VLSI Technology 2000
High performance 0.13 μm SOI CMOS technology with Cu interconnects and low-k BEOL dielectric
- P. Smeys
- V. McGahay
- et al.
- 2000
- VLSI Technology 2000
Partially-depleted SOI compact model - formulation and parameter extraction
- S.K.H. Fung
- L. Wagner
- et al.
- 2000
- VLSI Technology 2000