Development and optimization of porous pSiCOH interconnect dielectrics for 45 nm and beyond
- A. Grill
- S. Gates
- et al.
- 2008
- IITC 2008
Conference paper
Publications
4 results at IITC 2008
Performance and reliability of airgaps for advanced BEOL Interconnects
- S.V. Nitta
- D. Edelstein
- et al.
- 2008
- IITC 2008
Conference paperPhase change memory
- Matthew J. Breitwisch
- 2008
- IITC 2008
Conference paperA 3D-IC technology with integrated microchannel cooling
- Deepak Sekar
- Calvin King
- et al.
- 2008
- IITC 2008
Conference paper