Plasma-enhanced atomic layer deposition of tantalum thin films: The growth and film properties
- H. Kim
- S.M. Rossnagel
- 2003
- Thin Solid Films
Publications
3537 results for Materials Discovery
Microcontact Printing Using Poly(dimethylsiloxane) Stamps Hydrophilized by Poly(ethylene oxide) Silanes
- Emmanuel Delamarche
- Christian Donzel
- et al.
- 2003
- Langmuir
Thin film deposition with physical vapor deposition and related technologies
- S.M. Rossnagel
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nanofabrication
- Christie R.K. Marrian
- Donald M. Tennant
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Epitaxial Si films grown on lattice matched (LaxY 1-x)O3/Si (111) structures by molecular beam epitaxy
- V. Narayanan
- S. Guha
- et al.
- 2002
- MRS Proceedings 2002
Ferroelectric field effect device
- A.G. Schrott
- J. Misewich
- et al.
- 2002
- MRS Proceedings 2002
Precision placement of heteroepitaxial semiconductor quantum dots
- R. Hull
- J. Gray
- et al.
- 2003
- Materials Science and Engineering: B
Volume contractions induced by crosslinking: A novel route to nanoporous polymer films
- Unyong Jeong
- Du Yeol Ryu
- et al.
- 2003
- Advanced Materials
Oscillatory drag, lift, and torque on a circular cylinder in a uniform flow
- Stanley K. Jordan
- Jacob E. Fromm
- 2003
- Physics of Fluids
Texture of Cu and dilute binary Cu-alloy films: Impact of annealing and solute content
- K. Barmak
- A. Gungor
- et al.
- 2003
- Materials Science in Semiconductor Processing