P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
By rheology experiments we show that the torque created by sliding friction between a polyurethane foam planarizing pad and patterned silicon dioxide wafer in contact creates a large second-order tensile normal force previously found only in the torsion of bulk specimens. The normal force is a linear function of the square of the torque. Such tensile force reduces the applied compressive force. With elaborate polishing experiments we found second-order normal extension of the polymer into the valleys of the opposing surface which by interlocking the interface may provide a new mechanism for friction. © 2003 Plenum Publishing Corporation.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
D.E. Fowler, D.C. Miller
Surface Science Spectra
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Physical Chemistry Chemical Physics
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Surface and Coatings Technology