Reactive Ion Etching of GaAs in Chlorine and Resulting Surface Damage
- B.S. Lee
- H. Baratte
- 2019
- JES
Publications
14365 results for Physical Sciences
Reactive Ion Etching of PECVD n+ a-Si:H: Plasma Damage to PECVD Silicon Nitride Film and Application to Thin Film Transistor Preparation
- M.S. Crowder
- 2019
- JES
A new process using two photo-masks to prepare trilayer thin film transistors
- Yue Kuo
- 2019
- JES
Electroplated Magnetic Media with Vertical Anisotropy
- Jean Horkans
- I-Chia Hsu Chang
- et al.
- 2019
- JES
Dopant Segregation in CZ and MCZ Silicon Crystal Growth: A Comparison Between Experiment and Numerical Simulation
- K.M. Kim
- W.E. Langlois
- 2019
- JES
A Cyclic Voltammetric Study of Pd-Sn Colloidal Catalysts for Electroless Deposition
- Jean Horkans
- 2019
- JES
Phosphorus-Doped Polycrystalline Silicon via LPCVD: I. Process Characterization
- B.S. Meyerson
- W.L. Olbricht
- 2019
- JES
Temperature and Bias Effects on the Physical and Tribological Properties of Diamond-Like Carbon
- A. Grill
- V.V. Patel
- et al.
- 2019
- JES
The defect mitigation on EUV stack by track based technology
- Naoki Shibata
- Lior Huli
- et al.
- 2019
- SPIE Advanced Lithography 2019
Track based techniques to improve high-resolution EUV patterning defectivity
- Naoki Shibata
- Lior Huli
- et al.
- 2018
- EUVL 2018