C-Quad polarized illumination for back end thin wire: Moving beyond annular illumination regime
- Sohan Singh Mehta
- Hyung-Rae Lee
- et al.
- 2009
- SPIE Advanced Lithography 2009
Publications
3593 results for Mathematical Sciences
22 nm technology node active layer patterning for planar transistor devices
- Ryoung-Han Kim
- Steven Holmes
- et al.
- 2009
- SPIE Advanced Lithography 2009
A computational technique to optimally design in-situ diffractive elements: Applications to projection lithography at the resist resolution limit
- Gonzalo R. Feijóo
- Jaione Tirapu-Azpiroz
- et al.
- 2009
- SPIE Advanced Lithography 2009
New approaches for deniable authentication
- Mario Di Raimondo
- Rosario Gennaro
- 2009
- Journal of Cryptology
Growth kinetics of si and ge nanowires
- S. Kodambaka
- J. Tersoff
- et al.
- 2009
- SPIE OPTO 2009
Multipartite separability of Laplacian matrices of graphs
- 2009
- Electronic Journal of Combinatorics
Competitive algorithms for due date scheduling
- Nikhil Bansal
- Ho-Leung Chan
- et al.
- 2009
- Algorithmica (New York)
Hash function requirements for Schnorr signatures
- Gregory Neven
- Nigel P. Smart
- et al.
- 2009
- Journal of Mathematical Cryptology
Improved approximation algorithms for metric maximum ATSP and maximum 3-cycle cover problems
- Markus Bläser
- L. Shankar Ram
- et al.
- 2009
- Operations Research Letters
Distributed SBP Cholesky factorization algorithms with near-optimal scheduling
- Fred G. Gustavson
- Lars Karlsson
- et al.
- 2009
- ACM TOMS