Publications

3548 results for Mathematical Sciences

Resist freezing process for double exposure lithography
- - Kuang-Jung Rex Chen
  - Wu-Song Huang
  - et al.
- 2008
- SPIE Advanced Lithography 2008
A new class of low bake resists for 193-nm immersion lithography
- - Ratnam Sooriyakumaran
  - Richard DiPietro
  - et al.
- 2008
- SPIE Advanced Lithography 2008
The limitations of high index resists for 193nm hyper-NA lithography
- - Gregory McIntyre
  - Daniel Sanders
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Resource constrained stream mining with classifier tree topologies
- - Brian Foo
  - Deepak S. Turaga
  - et al.
- 2008
- IEEE SPL
Adaptive barrier update strategies for nonlinear interior methods
- - Jorge Nocedal
  - Andreas Wächter
  - et al.
- 2008
- SIAM Journal on Optimization
The halting probability via Wang tiles
- - Gregory Chaitin
- 2008
- Fundamenta Informaticae
Improvements in accuracy of dense OPC models
- - Chidam Kallingal
  - James Oberschmidt
  - et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
On-chip timing uncertainty measurements on IBM microprocessors
- - R.L. Franch
  - P. Restle
  - et al.
- 2008
- IEEE ITC 2008
Integration of polymer self-assembly for lithographic application
- - Joy Y. Cheng
  - Daniel P. Sanders
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Chemical and mechanical properties of UV-cured nanoimprint resists and release layer interactions
- - Frances A. Houle
  - Ann Fornof
  - et al.
- 2008
- SPIE Advanced Lithography 2008