Comparison of vapor and liquid phase silylation processes of photoresists
- E. Babich
- J. Paraszczak
- et al.
- 1991
- Microelectronic Engineering
Paper
Publications
14468 results for Physical Sciences
The importance of cage versus escape reactivity in the photochemistry of onium salts
- Nigel P. Hacker
- John L. Dektar
- et al.
- 1991
- J. Photopolym. Sci. Tech.
PaperCarbon doping of GaP, GalnP, and AlinP in metalorganic molecular beam epitaxy using methyl and ethyl precursors
- T.J. De Lyon
- J. Woodall
- et al.
- 1991
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
PaperCalculations of the dimensional dependence of the critical state in disk-shaped superconductors
- L.W. Conner
- A.P. Malozemoff
- 1991
- Physical Review B
PaperAerosol problems in clean technologies for microelectronics
- Douglas W. Cooper
- 1991
- Journal of Aerosol Science
PaperMetastability in slow thin-film reactions
- K.N. Tu
- S.R. Herd
- et al.
- 1991
- Physical Review B
PaperOptical study of plasmons in Tl2Ba2Ca2Cu3O10
- Ivan Boović
- J.H. Kim
- et al.
- 1991
- Physical Review B
PaperElectron beam tester measurements of switching noise in VLSI circuits
- Keith A. Jenkins
- David F. Heidel
- 1991
- Microelectronic Engineering
PaperSurface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMagnetic and metal-insulator transitions in metallic hydrogen
- V.L. Moruzzi
- P.M. Marcus
- 1991
- Physical Review B
Paper