Journal of Aerosol Science

Paper

01 Jan 1991

Aerosol problems in clean technologies for microelectronics

View publication

Abstract

Aerosol research priorities as related to contamination control in themicroelectronics industry are outlined, based largely on the National Science Foundation Workshop of November 1990 and the author's contribution to that workshop. © 1991 Pergamon Press plc.

Related

Paper

Specific heat of silicon in the millidegree region

Robert W. Keyes

Physical Review B

Paper

Kinetic model for the chemical vapor deposition of tungsten in the silane reduction process

Julian J. Hsieh

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

Vortex dynamics in YBaCuO single crystals with point- and line-like defects-flux creep studies

J.R. Thompson, Yang Ren Sun, et al.

Physica A: Statistical Mechanics and its Applications

Paper

Pair and triplet interactions in argon

J.A. Barker, D. Henderson, et al.

Molecular Physics

View all publications