Modeling and experiments of non-telecentric thick mask effects for EUV lithography
- Gregory McIntyre
- Chiew-Seng Koay
- et al.
- 2009
- SPIE Advanced Lithography 2009
Publications
3593 results for Mathematical Sciences
Conditional probability tree estimation analysis and algorithms
- Alina Beygelzimer
- John Langford
- et al.
- 2009
- UAI 2009
Parameter-specific electronic measurement and analysis of sources of variation using ring oscillators
- Lynn T.-N. Wang
- Liang-Teck Panga
- et al.
- 2009
- SPIE Advanced Lithography 2009
Compensating non-optical effects using electrically-driven optical proximity correction
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2009
- SPIE Advanced Lithography 2009
Flexible optical interconnects based on silicon-containing polymers
- Ed Anzures
- Roger Dangel
- et al.
- 2009
- SPIE OPTO 2009
Communication technologies for exascale systems
- J.A. Kash
- P. Pepeljugoski
- et al.
- 2009
- SPIE OPTO 2009
Modeling and simulation of transistor performance shift under pattern-dependent RTA process
- Yun Ye
- Frank Liu
- et al.
- 2009
- SPIE Advanced Lithography 2009
Cr migration on 193nm binary photomasks
- John Bruley
- Geoffrey Burr
- et al.
- 2009
- SPIE Advanced Lithography 2009
The measurement uncertainty challenge of advanced patterning development 727203
- Narender Rana
- Chas Archie
- et al.
- 2009
- SPIE Advanced Lithography 2009
Resist-based polarization monitoring with phase-shift masks at 1.35 numerical aperture
- Gregory McIntyre
- Richard Tu
- 2009
- SPIE Advanced Lithography 2009