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Characterization of a next generation step-and-scan system
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In this paper we show that the ideal of any algebraic curve in affine 3-space whose Jacobian matrix has rank at least 1 at every singular point of the curve can be generated by three polynomials and we give constructive procedures to compute such generators. © 2009 Elsevier Ltd. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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